Title:
位置検出装置及び露光装置
Document Type and Number:
Japanese Patent JP4756341
Kind Code:
B2
Inventors:
Tsuneyuki Hagiwara
Application Number:
JP2005339841A
Publication Date:
August 24, 2011
Filing Date:
November 25, 2005
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G01B11/00; G03F7/20
Domestic Patent References:
| JP9189520A | ||||
| JP9190965A | ||||
| JP2001118768A | ||||
| JP2001250766A | ||||
| JP2003156322A | ||||
| JP2006053056A |
Attorney, Agent or Firm:
Atsushi Tateishi