Title:
POSITION DETECTOR AND METHOD, AND LASER BEAM MACHINING APPARATUS AND METHOD
Document Type and Number:
Japanese Patent JP2006150406
Kind Code:
A
Abstract:
To provide a position detector that makes it possible to observe a desired position on the surface of a target without moving it.
The position detector is provided with an observation apparatus 21 for viewing a target 2 in an observation range and, for the purpose of viewing a part of the region on the surface of the target with the observation apparatus, is also provided with a scanning optical system 15 capable of guiding the light reflected from or scattered on the surface of the target to the observation apparatus and moving the observation range of the apparatus within the surface of the target.
Inventors:
Okudaira, Yasuyuki
Murano, Kenichi
Murano, Kenichi
Application Number:
JP2004000344561
Publication Date:
June 15, 2006
Filing Date:
November 29, 2004
Export Citation:
Assignee:
SUMITOMO HEAVY IND LTD
International Classes:
B23K26/02; B23K26/00; B23K26/00; B23K26/02
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