To provide a position sensor capable of measuring concurrently a relative parallel displacement and inclination posture of a target member by an X, a Y, a Z, a yaw, a pitch and a roll.

An array of lens 215, 216 for providing an array of structured optical pattern is included in the target member 210. The structured optical pattern is converged and dispersed, and a size of a structured optical image is varied in response to "Z" coordinates in a relative position. A position of the individual structured optical image 242 on an image processing array 230 is varied according to the relative position of the target member 210, and a shape of the structured optical image is varied in response to a relative angle direction. Three or more of the structured optical images analyzed in the same image are thereby used to determine a 6D measured value between the target member 210 and an array detector 230. An X-moving amount and Y-moving amount of the target member 210 are accumulated by a known method, and other 6D measured components are absolute measured values in an optional position.