POSITION MEASURING INSTRUMENT

Japanese Patent JP3713355

B2

PROBLEM TO BE SOLVED: To provide a position measuring instrument which measures the position of an object to be measured in the normal direction over a wide measuring range (dynamic range) by irradiating the surface of the object with at least three laser beams at different angles and using interference light among the three beams.
SOLUTION: The emitting optical system 300 of a position measuring instrument emits a laser beam from a light source upon the two-dimensional pattern 12 of an object 10 at a first incident angle as a reference illuminating laser beam for measurement in normal direction, at a second incident angle as a first illuminating laser beam for measurement in the normal direction, and at a third incident angle as a second laser beam for measurement in the normal direction. A light receiving section 500 forms an interference signal for measurement in the first normal direction by causing interference between the reference laser beam and first laser beam for measurement of the reflected laser beam received by means of a light receiving optical system 400 and another interference signal for measurement in the second normal direction by causing interference between the reference laser beam and the first or second laser beam flux for measurement. A signal processing section measures the position of an object in the normal direction based on the phases of the interference signals for measurement.

Shinya Watanabe
Suzuki etc.
Kazuo Abe
Shin Saito
Toru Tojo
Ryoichi Hirano

JP6867097A

November 09, 2005

March 21, 1997

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Topcon Co., Ltd.
Toshiba Corporation

G01D5/38; G01B11/00; G03F9/00; H01L21/027; (IPC1-7): G01B11/00; G03F9/00; H01L21/027

JP8186069A
JP7130614A

Minoru Nakamura
Fumiaki Otsuka
Shishido Kaichi
Hideto Takeuchi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo

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