Title:
原子間力顕微鏡及び原子間力顕微鏡の位置設定方法
Document Type and Number:
Japanese Patent JP7031852
Kind Code:
B2
Abstract:
To provide an interatomic force microscope that can automatically set an alignment before the start of measurement, and a method for setting the position of an interatomic force microscope.SOLUTION: The interatomic force microscope includes: a vertical-direction camera 32 with its imaging direction set in a first direction, the camera 32 being for imaging a cantilever 13, a sample board 11, and a laser beam; and a side camera 31 with its imaging direction set in a second direction different from the first direction, the side camera being for imaging the cantilever 13, the sample board 11, and a laser beam. On the basis of images taken by the vertical-direction camera 32 and the side camera 31, the positions of the cantilever 13 and the sample board 11 are automatically set.SELECTED DRAWING: Figure 1
Inventors:
Nobuyoshi Yamagishi
Takashi Morii
Takao Okada
Takashi Morii
Takao Okada
Application Number:
JP2017250994A
Publication Date:
March 08, 2022
Filing Date:
December 27, 2017
Export Citation:
Assignee:
Bio-Molecular Measurement Institute
International Classes:
G01Q20/02; G01Q10/00; G01Q60/24
Domestic Patent References:
| JP2014044075A | ||||
| JP2010190590A | ||||
| JP2013058288A | ||||
| JP2007170862A | ||||
| JP10104245A | ||||
| JP2017101923A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Shunichi Takahashi
Masakazu Ito
Toshio Takamatsu
Shunichi Takahashi
Masakazu Ito
Toshio Takamatsu