To collectively determine a shift amount of a substrate center position, for a laminated substrate composed of two sets of vertically layered discoidal substrates, in element forming or the like.
Contour measurement means 3A detects a contour shape of two sets of superposed substrates 21, 22 from a projection image of a laminated substrate 2 in a thickness direction, while edge shape measurement means 4 detects respective edge shapes of the two sets of substrates 21, 22 from a projection image of the laminated substrate 2 in a tangential direction, at multiple points in a circumferential direction. Then, calculation means 6 detects shape data of either one of the substrate sets from a detection result of the contour measurement means 3 to determine a diameter and a center position, while as for the other substrate set, shape data is obtained from a relative positional relationship between the two sets of substrates detected by the edge shape measurement means 4, using the shape data of the other set of substrate as a standard, to determine a diameter and a center position. Thereafter, the shift amount is determined from a distance of the center position between the two sets of substrates.
IBA KUNIO
| JPH06213620A | 1994-08-05 | |||
| JP2002050749A | 2002-02-15 | |||
| JP2002050749A | 2002-02-15 | |||
| JPH06213620A | 1994-08-05 |
| WO2008018537A1 | 2008-02-14 | |||
| WO2008018537A1 | 2008-02-14 |
Masataka Otani
Satoshi Sakurai
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