PURPOSE: To maintain compatibility between a flexible motion without any shock and high positional accuracy, and provide a positioning actuator pertinent for a manufacturing facility by allowing an intermediate stop position to be accurately determined while maintaining a space-saving characteristic and crawling drive stability as an advantage pertaining to a flexible actuator.
CONSTITUTION: A positioning actuator 1 gives a flexible movement via the expansion and contraction of a telescopic tube 2, and a positioning sensor 10 is housed within the tube 2, thereby making a device compact. Furthermore, a movable holder 4 can be stopped at an arbitrary intermediate position without generating any dust by controlling a pressure feed valve 8 and a pressure releasing valve 9 for the open/close operation thereof. In addition, high positional accuracy can be provided by performing the control operation via a PWM modulation process. Also, the telescopic movement of the tube 2 does not employ the principle of frictional slide and a sticking phenomenon does not appear, thereby allowing stable crawling drive and smooth stopping behavior. Furthermore, when the valves 8 and 9 are closed, the inside of the tube 2 becomes airtight and the tube 2 is free from dislocation, even if left in place for a long time.
TARUSAWA TETSUNOBU
JPS6226982A | 1987-02-04 | |||
JPS62184202A | 1987-08-12 | |||
JPS61157804A | 1986-07-17 |