Title:
位置決め制御装置
Document Type and Number:
Japanese Patent JP4474674
Kind Code:
B2
Abstract:
A pre-compensator is provided based on a definition of abase vibration model having a motor transfer function 1 for generating motor displacement 12 from an input that is the sum of input torque and a table propelling force 10 multiplied with a reducer and Cartesian-to-polar coordinate transformation constant 14 , a table transfer function 14 for multiplying a deviation 11 between an output that is the motor displacement multiplied with a reducer and polar-to-Cartesian coordinate transformation constant 2 and table displacement with a table-displacement-to-force conversion spring constant 3 to generate the table propelling force 10 and to output table displacement 7 , and a base driving transfer function 5 for generating base displacement by multiplying base displacement 9 with a base-displacement-to-force conversion spring coefficient 6 and inputting the same with the table propelling force, table displacement 8 being generated from a difference between the table displacement and the base displacement.
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Inventors:
Hidemi Honda
Ryuichi Oguro
Guo Sohu
Ryuichi Oguro
Guo Sohu
Application Number:
JP2000602899A
Publication Date:
June 09, 2010
Filing Date:
March 02, 2000
Export Citation:
Assignee:
Yaskawa Electric Co., Ltd.
International Classes:
B23Q5/22; G05D3/12; G05B5/01; G05B11/36
Domestic Patent References:
| JP2082303A | ||||
| JP4271290A | ||||
| JP4333110A | ||||
| JP9244710A | ||||
| JP61032120A |