PURPOSE: To quickly and accurately position a work in a target position by moving the work to a target position by means of compressed air and then positioning the work to the target position by means of a motor.
CONSTITUTION: A servo cylinder device 10 is provided with a cylinder main body 16, which moves a work (W) by using an electropneumatic regulator 14 and compressed air, an electromagnetic switching valve 20, which supplies air to a cylinder 18 for braking and which blows off the compressed air from the cylinder 18, and a controller 20, which controls the positioning of the work (W). Inside the cylinder main body 16, a ball-screw shaft rotating mechanism is prepared, while a servo motor 64 is installed in parallel with the ball screw shaft, and an encoder 68 is provided to a driving shaft of the motor 64. The work (W), which is attached to a piston rod, is moved by the pressure of the air, which is supplied to a cylinder chamber. When the work (W) reaches a prescribed position in the vicinity of a target position, a motor 64 is driven for rotation, so that the work (W) is moved by means of bath rotary torque of the motor and the compressed air.
SUGIURA MITSURU
KAYAMA NAGAOKI
