Title:
POSITIONING DEVICE AND EXPOSURE SYSTEM PROVIDED THEREWITH
Document Type and Number:
Japanese Patent JP3963410
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a positioning device which is capable of carrying out a positioning operation of high accuracy preventing transmission of vibrations attendant on an enhancement in a stage vibrating force, by a method wherein a mass, a guide which supports and guides the mass, a linear motor which moves the mass, and a control means which controls the linear motor are provided to an inertial force applying means.
SOLUTION: Four inertial force applying mechanisms are arranged on a stage base 8 or a platen 9, adjacent to the working surface of an inertia force corresponding to the accelerating/decelerating speed of a stage and driven as controlled so as to cancel the inertial force of the stage. The inertial force applying mechanisms are composed of masses 13a to 13d (13), guides 14a to 14d (14), linear motors 52 and 53 which move the masses 13, and a control 14 which controls the linear motors 52 and 53. The guides 14 include static pressure air bearings 51. A large reaction force transmitted to the stage base 8 accompanying an inertial force generated at the acceleration/deceleration of an XY stage is canceled by driving the mass 13 mounted on the platen 9, so as to cancel the reaction force.
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Inventors:
Kotaro Bank
Hirohito Ito
Eiji Koyamauchi
Hirohito Ito
Eiji Koyamauchi
Application Number:
JP11589098A
Publication Date:
August 22, 2007
Filing Date:
April 13, 1998
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B21/00; H01L21/68; B23Q1/00; B23Q1/30; B23Q1/62; B23Q11/00; H01L21/027; (IPC1-7): H01L21/68; B23Q1/30; B23Q11/00; G01B21/00; H01L21/027
Domestic Patent References:
| JP7254555A | ||||
| JP3125048A | ||||
| JP8063231A | ||||
| JP3107639A | ||||
| JP3021894A | ||||
| JP5304081A | ||||
| JP7318699A |
Attorney, Agent or Firm:
Tetsuya Ito