POSITIONING AND DEVICE THEREFOR

Title:

POSITIONING AND DEVICE THEREFOR

Document Type and Number:

Japanese Patent JPH07130649

Kind Code:

A

Abstract:

PURPOSE: To omit a photoswitch or the like for finding an origin.

CONSTITUTION: A holding board 6 moves a moving region within a X-Y plane in the direction of a Y-axis by a Y-driving cylinder 3 and in the direction of a Y-axis by a X-driving cylinder 3. A position of the holding board 6 is detected by a Y-interferometer 9 and a X-interferometer 10 photoreceiving reflected light of a Y-mirror 7 and a X-mirror 8 integrated with this board. The Y-mirror 7 and the X-mirror 8 are provided with the reflection-preventive films 7a, 8a on the respective ends for setting up an output of the Y-interferometer 9 to a prescribed reference value by the reflection-preventive film 8a of the X-mirror when an error signal is generated on the X-interferometer. The origin finding of the X-interferometer 10 is also similarly performed by an error signal of a second Y-interferometer 11.

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Inventors:

YAMAZAKI TOSHIHIRO

Application Number:

JP30238193A

Publication Date:

May 19, 1995

Filing Date:

November 08, 1993

Export Citation:

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Assignee:

CANON KK

International Classes:

G01B9/02; B23Q16/00; G01B11/00; G03F9/00; H01L21/027; H01L21/68; (IPC1-7): H01L21/027; B23Q16/00; G01B9/02; G01B11/00; G03F9/00; H01L21/68

Attorney, Agent or Firm:

Yoshiro Sakamoto

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