Title:
POSITIONING DEVICE
Document Type and Number:
Japanese Patent JP2002236518
Kind Code:
A
Abstract:
To provide a positioning device which saves the space for the whole system and positions a moving body more stably than before even in environment wherein there is vibration.
As a means for fixing the moving body 39 on a reference surface 31, a means which presses the moving body against the reference surface with the jet pressure from an air bearing 45B supporting the moving body and fixes it is used instead of or in addition to a means which presses and fixes the moving body on the reference surface through a suction hollow.
Inventors:
ISHIMOTO EIJI
Application Number:
JP2001034792A
Publication Date:
August 23, 2002
Filing Date:
February 13, 2001
Export Citation:
Assignee:
AGILENT TECHNOLOGIES JAPAN LTD
International Classes:
G11B5/455; G05D3/10; G11B5/84; (IPC1-7): G05D3/10; G11B5/455; G11B5/84
Attorney, Agent or Firm:
Kimohisa Kato
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