Title:
位置決め装置
Document Type and Number:
Japanese Patent JP4422957
Kind Code:
B2
Abstract:
A positioning apparatus including a movable member for transmitting a driving force in a driving-axis direction to a stage, a first electromagnet for driving the movable member in the driving-axis direction by forming a magnetic path between the movable member and the first electromagnet and generating first magnetic flux, and a second electromagnet, which is positioned away from the first electromagnet and arranged in an overlapping direction, for driving the movable member in the driving-axis direction by forming a magnetic path between the movable member and the second electromagnet and generating second magnetic flux having an inverted polarity from the first magnetic flux.
Inventors:
Shinji Uchida
Application Number:
JP2002318486A
Publication Date:
March 03, 2010
Filing Date:
October 31, 2002
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; H01L21/027; G03F9/00; H01J37/20; H01L21/68; H02K33/12
Domestic Patent References:
| JP2002305867A | ||||
| JP2002125359A | ||||
| JP2001284438A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura