Title:
POSITIONING DEVICE
Document Type and Number:
Japanese Patent JPS6453102
Kind Code:
A
Abstract:
PURPOSE:To excellently and accurately position an object even in case of temperature variation by detecting the temperature variation of a support part for a projection means and an alignment means and measuring a mechanical interval, and correcting a last measured value. CONSTITUTION:A base line value before the temperature variation, initial values of measured temperature by temperature sensors TS1 and TS2, the standard value of temperature variation for correcting the base line value are stored in a central control part 6 respectively. The temperature sensors TS1 and TS2 fitted to the support part 34 and an alignment detection system 36 measure temperature and input their values to the central control part 46, and the temperature variation is found by using the previously stored initial values and compared with a prescribed value. When the temperature variation is smaller than the prescribed value, the base line value stored in the central control part 46 updated and a new base line value is utilized after the update to position a reticle R and a wafer W.
Inventors:
TANIMOTO SHOICHI
MURAKAMI SHIGEO
MURAKAMI SHIGEO
Application Number:
JP20826487A
Publication Date:
March 01, 1989
Filing Date:
August 24, 1987
Export Citation:
Assignee:
NIKON CORP
International Classes:
G01B11/14; G03F9/00; H01L21/027; H01L21/30; H01L21/68; (IPC1-7): G01B11/14; G03F9/00; H01L21/30; H01L21/68
Attorney, Agent or Firm:
Masatoshi Sato