To avoid increasing or decreasing by a sticky material of a cavity volume defined by a channel provided on a substrate forming a liquid metal switch .

Deposition materials are deposited on a channel plate to be positioned correctly to one or a plurality of channels 102, 104, 106, or the like formed in a channel plate 100. For that purpose, (1) resist free from wetting by the deposition materials is filled in at least one (e.g. channel 104) of the plurality of channels, (2) the materials are deposited at a part (e.g. region 112) contacting at least a boundary of a part of the filled resist that is also at least one region of the channel plate 100, then (3) the resist is eliminated. As a result, an end part of the deposition materials and an end part of the channel are aligned, so that the cavity volume defined by the channel becomes stable.