To provide a positioning device, by which high-precision (≤10 nm) positioning can be performed precisely and quickly.
A moving speed switching command signal generation outputting means is so formed as to generate/output a middle-speed movement command signal, before the existing position of a table enters a second set range, and generates/outputs a low-speed movement command signal, before the position enters a first set range, by using a command pulse signal and a detected movement displacement from a movement displacement detecting means (a minimum detection resolution of 10 nm or lower). Also a drive pulse generation output means is so formed as to generate/output high-speed drive pulse signals of a frequency for high speed, by a number which corresponds to a distance to be moved of the table by the output of command pulse signals, and to generate/output middle-speed drive pulse signals of a frequency for intermediate speed by middle-speed movement command signals from the moving speed switching command signal generation outputting means, and low-speed drive pulse signals of a frequency for low speed by low-speed movement command signals.
MASUDA TOMIO
ICHIKAWA SOJI
Inoue Ichi
Yukio Fuse
Mitsue Obuchi