To accurately perform positioning of a moving body moving relative to a fixed body.
When a load for moving a moving part relative to the fixed body is smaller than a predetermined value, positioning is finished when it is determined that the moving part comes to the target position. When the load is larger than the predetermined value, positioning is not finished even when it is determined that the moving part comes to the target position, the moving body is moved to a retry starting position to be a separate position, a retry motion for moving from there to the position to be target is performed. When the load becomes smaller than the predetermined value while the retry motion is repeated a prescribed number of times, positioning is finished.
YAMAMURA HIROYUKI
FUJIMOTO KATSUHIRO
Tadahiro Mitsuishi
Yasuyuki Tanaka
Hiroshi Matsumoto
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