To provide a stage mechanism having a straight guiding accuracy of within 0.05 μm without being affected by the torque of a table drive screw nor causing yawing.

Linear motion hydrostatic air bearings are provided parallel to each other on both right and left sides and a ball screw 6 and a linear motion bearing guiding a ball screw nut below the ball screw 6 are provided at the center. A connecting rod for connecting the nut to a table 5 is provided halfway between the right and left linear motion hydrostatic air bearings. Cutouts are provided in both ends of the connecting bar from the right and left to form elastic hinges, inside which cutouts are provided from the top and bottom to form elastic hinges. A connecting cable or hose to equipment on the table 5 is placed at the center of the table 5.