PURPOSE: To simplify, lighten and miniaturize a structure, to enhance positioning accuracy and to make the use in a vacuum chamber possible by incorporating a linear motor to directly drive a work table.

CONSTITUTION: N-poles and S-poles are alternately arranged on a base table 1 composed of a magnetic material in parallel to X- and Y-axes and a group of permanent magnets 2 is arranged in a gridiron pattern. The first sliders 4 having coil elements 4a provided to the surfaces thereof opposed to the group of the permanent magnets 2 are provided on a pair of the first linear guide shafts 3 parallel to the X-axis provided on both sides of the table 1. The second sliders 7 having coil elements 7a provided to the surface thereof opposed to the group of the permanent magnets 2 are provided on the second linear guide shaft 5 supported by the guide shafts 3 so as to cross the shafts 3 at a right angle and a work mounting table 6 is provided on the slider 7. The elements 4a, 7a are used as armature coils and the magnets 2 are used as field magnets to constitute a movable coil type linear DC motor and the supply of a current to the motor is controlled by a controller to which a program is set through the separate driver circuits of the X- and Y-axes.