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Patent Searching and Data


Title:
POSITIVE PHOTORESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN
Document Type and Number:
Japanese Patent JP2004045618
Kind Code:
A
Abstract:

To provide a material suitable for manufacturing a system LCD, having excellent linearity and capable of forming a fine resist pattern.

A positive photoresist composition for manufacturing a substrate on which an integrated circuit and a liquid crystal display part are formed together contains an alkali soluble resin (A), a naphthoquinonediazido ester (B), a phenolic hydroxyl group containing compound (C) having a specific structure and an organic solvent (D). A method for forming the resist pattern comprises a step for forming a resist coating film on the substrate by using the positive resist composition and a step for performing selective exposure using a mask on which both of a mask pattern for forming the resist pattern for the integral circuit and a mask pattern for forming the resist pattern for the liquid crystal display part are formed to simultaneously form the resist pattern for the integral circuit and the resist pattern for the liquid crystal display part.


Inventors:
TATE TOSHISATO
KATANO AKIRA
NIIKURA SATOSHI
Application Number:
JP2002201309A
Publication Date:
February 12, 2004
Filing Date:
July 10, 2002
Export Citation:
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Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
G03F7/004; G02F1/13; G03F7/00; G03F7/022; G03F7/039; H01L21/027; (IPC1-7): G03F7/004; G03F7/022; H01L21/027
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai