Title:
ポジ型フォトレジスト組成物
Document Type and Number:
Japanese Patent JP4264185
Kind Code:
B2
Inventors:
Fumiyuki Nishiyama
Toru Fujimori
Toru Fujimori
Application Number:
JP2000186404A
Publication Date:
May 13, 2009
Filing Date:
June 21, 2000
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C08F212/04; C08F212/14; C08F220/18; C08K5/00; C08L25/18; C08L33/06; G03F7/004; H01L21/027
Domestic Patent References:
| JP11190904A | ||||
| JP11015161A | ||||
| JP9319092A | ||||
| JP2001324813A | ||||
| JP2001324812A | ||||
| JP2001188350A | ||||
| JP2000241980A | ||||
| JP2000003043A | ||||
| JP2000001469A |
Foreign References:
| WO1999052957A1 |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa