Title:
ポジ型感光性ポリアミドイミド樹脂組成物、パターンの製造方法及び電子部品
Document Type and Number:
Japanese Patent JP4736863
Kind Code:
B2
Inventors:
Hiroshi Matsutani
Katsuyuki Masuda
Katsuyuki Masuda
Application Number:
JP2006058678A
Publication Date:
July 27, 2011
Filing Date:
March 03, 2006
Export Citation:
Assignee:
Hitachi Chemical DuPont Micro Systems Co., Ltd.
International Classes:
G03F7/023; H01L21/027
Domestic Patent References:
| JP11102068A | ||||
| JP2006323128A | ||||
| JP2006152224A | ||||
| JP2005266673A |
Attorney, Agent or Firm:
Hiroaki Sakai