Title:
ポジ型感光性樹脂組成物
Document Type and Number:
Japanese Patent JP4280105
Kind Code:
B2
Inventors:
Kosuke Morita
Kazuya Ehara
Yuji Shibasaki
Mitsuru Ueda
Kenichi Goto
Masashi Tamai
Kazuya Ehara
Yuji Shibasaki
Mitsuru Ueda
Kenichi Goto
Masashi Tamai
Application Number:
JP2003120804A
Publication Date:
June 17, 2009
Filing Date:
April 25, 2003
Export Citation:
Assignee:
Mitsui Chemicals, Inc.
International Classes:
G03F7/023; G03F7/037; H01L21/027
Domestic Patent References:
| JP2001183834A |
Attorney, Agent or Firm:
Koichi Washida