Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
POSITIVE RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE SAME
Document Type and Number:
Japanese Patent JP2008224873
Kind Code:
A
Abstract:

To provide a positive resist composition having high sensitivity and capable of satisfying no pattern collapse and good exposure latitude, and a pattern forming method using the positive resist composition.

The positive resist composition comprises (A) a resin (A1) having a repeating unit (a1) of a structure selected from general formulae (pI)-(pV) and a resin (A2) having a repeating unit (a2) different from the repeating unit (a1) as resins of which the solubility in an alkali developer increases under the action of an acid, (B) a compound capable of generating an acid upon irradiation with actinic rays or radiation, and (C) a solvent. The pattern forming method using the positive resist composition is also provided.


Inventors:
KATO TAKAYUKI
SHIBUYA AKINORI
Application Number:
JP2007060519A
Publication Date:
September 25, 2008
Filing Date:
March 09, 2007
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FUJIFILM CORP
International Classes:
G03F7/039; H01L21/027
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa