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Title:
POSITIVE RESIST COMPOSITION
Document Type and Number:
Japanese Patent JP2003122007
Kind Code:
A
Abstract:

To provide a positive resist composition in which falling of patterns, a tailing and a scumming are decreased and to provide a positive resist composition in which development defects are decreased.

The positive resist composition contains (A) a resin which contains a repeating unit having an acid decomposable group having an alicyclic structure, a repeating unit having an alicyclic lactone structure and a repeating unit having a hydroxyl group or a cyano group and which increases the solubility rate with an alkali developing liquid by the effect of an acid and (B) a compound which generates an acid by irradiation of active rays or radiation.


Inventors:
SATO KENICHIRO
Application Number:
JP2001311568A
Publication Date:
April 25, 2003
Filing Date:
October 09, 2001
Export Citation:
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Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
G03F7/039; C08F20/18; C08F20/28; C08F20/34; H01L21/027; (IPC1-7): G03F7/039; C08F20/18; C08F20/28; C08F20/34; H01L21/027
Attorney, Agent or Firm:
Shohei Oguri (4 outside)