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Patent Searching and Data


Title:
POSITIVE RESIST COMPOSITION
Document Type and Number:
Japanese Patent JP2003167333
Kind Code:
A
Abstract:

To provide an excellent positive resist composition that is excellent in line edge roughness, prevents a pattern falling and does not cause the pattern falling even if a focus and exposure particularly in a fine pattern are varied.

The positive resist composition is characterized in containing (A) a compound capable of generating an acid upon irradiation with an actinic ray or a radiation, (B) a resin that is insoluble or slightly soluble in alkalis but becomes alkali-soluble under an action of an acid, (C) a basic compound and (D) a compound having at least three hydroxyl groups or at least three substituted hydroxyl groups and having at least one cyclic structure.


Inventors:
FUJIMORI TORU
KAWABE YASUMASA
Application Number:
JP2002000563A
Publication Date:
June 13, 2003
Filing Date:
January 07, 2002
Export Citation:
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Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
C08F212/14; C08F220/10; C08F232/00; G03F7/004; G03F7/039; H01L21/027; (IPC1-7): G03F7/004; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Shohei Oguri (4 outside)