Title:
ポジ型レジスト材料及びこれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP4642452
Kind Code:
B2
Inventors:
Jun Hatakeyama
Takanobu Takeda
Takanobu Takeda
Application Number:
JP2004360713A
Publication Date:
March 02, 2011
Filing Date:
December 14, 2004
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C08F232/08; C08F212/14; G03F7/033; G03F7/039; H01L21/027
Domestic Patent References:
| JP2001192539A | ||||
| JP2002244297A | ||||
| JP2004115630A | ||||
| JP2005330369A | ||||
| JP2005330366A |
Attorney, Agent or Firm:
Shoichi Okuyama
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura