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Title:
POSITIVE TYPE PHOTORESIST
Document Type and Number:
Japanese Patent JPH0850356
Kind Code:
A
Abstract:

PURPOSE: To provide a positive type photoresist material which has a long-term preservation life without requiring a thermal post treatment, affords a relief structure of good resolution and has high photosensitivity.

CONSTITUTION: This positive type photoresist compsn. consists of at least one kind of hompolymers or copolymers contg. acid active (acidlabile) α-alkoxyalkyl ester group, at least one kind of carboxyl-contg. copolymers having 0.40 to 5.50mol/kg content of carboxyl groups, at least one kind of compds. forming an acid in exposure to chemical rays and is developable with an aq. alkaline medium consisting of an org. solvent. This process for production of the relief structure uses such photoresist compsn.


Inventors:
TANG QIAN (CH)
ROTH MARTIN (CH)
Application Number:
JP17955495A
Publication Date:
February 20, 1996
Filing Date:
June 22, 1995
Export Citation:
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Assignee:
CIBA GEIGY AG
International Classes:
C08K5/02; C08K5/22; C08K5/36; C08L33/02; C08L33/04; C08L33/14; C08L35/02; G03F7/004; G03F7/039; H01L21/027; (IPC1-7): G03F7/039; C08K5/02; C08K5/22; C08K5/36; C08L33/02; C08L33/14; C08L35/02; G03F7/004; H01L21/027
Attorney, Agent or Firm:
Nobuo Kaida (1 person outside)



 
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