Title:
ポジ型感光性組成物及びそれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP4691456
Kind Code:
B2
Inventors:
Hiroshi Saegusa
Application Number:
JP2006053263A
Publication Date:
June 01, 2011
Filing Date:
February 28, 2006
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; H01L21/027
Domestic Patent References:
JP2003241382A | ||||
JP11035522A |
Foreign References:
WO2005082956A1 |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa