Title:
ポジ型感光性樹脂組成物
Document Type and Number:
Japanese Patent JP5603223
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition with an excellent swelling ratio.SOLUTION: The positive photosensitive resin composition contains resins (A) and a radiation-sensitive acid generator (B). At least one of the resins (A) contains a crosslinkable group as well as a structural unit (A1) having an acid group protected by an acid-dissociable group, represented by the specified general formula (1).
Inventors:
Kikuchi 渉
Koichi Sugihara
Koichi Sugihara
Application Number:
JP2010286495A
Publication Date:
October 08, 2014
Filing Date:
December 22, 2010
Export Citation:
Assignee:
Fuji Photo Film Co., Ltd.
International Classes:
G03F7/039; G02F1/1333; G03F7/004; G03F7/40; H01L21/027; H01L51/50; H05B33/22
Attorney, Agent or Firm:
Patent business corporation patent firm Sykes