ポジ型感光性組成物 - FUJIFILM Corporation

Title:

ポジ型感光性組成物

Document Type and Number:

Japanese Patent JP4253409

Kind Code:

B2

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Inventors:

Kunihiko Kodama
Kenichiro Sato
Toshiaki Aoi

Application Number:

JP28985499A

Publication Date:

April 15, 2009

Filing Date:

October 12, 1999

Export Citation:

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Assignee:

FUJIFILM Corporation

International Classes:

G03F7/039; H01L21/027; C08K5/10; C08K5/1535; C08K5/16; C08K5/3492; C08K5/353; C08K5/36; C08L33/04; C08L35/02; G03F7/004

Domestic Patent References:

JP10319595A
JP10133377A
JP9090637A
JP2000347410A
JP2000241977A
JP2000187329A
JP11327148A
JP2001100402A
JP2000338680A

Attorney, Agent or Firm:

Takeshi Takamatsu
Kiyozumi Yazawa

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