Title:
APPARATUS FOR CARRYING OUT VACUUM GLOW DISCHARGE TREATMENT AND TREATING METHOD
Document Type and Number:
Japanese Patent JP3204801
Kind Code:
B2
Abstract:
PURPOSE: To obtain a vacuum glow discharge treating apparatus capable of carrying out stable discharge treatment free from abnormal discharge over a long time, preventing damage of parts, etc., and readily carrying out maintenance by preventing raising of temperature of electrodes.
CONSTITUTION: In plural electrodes 13 in a vacuum housing 3 of a vacuum glow discharge treating apparatus, a hollow part for passage of refrigerant is formed. A refrigerant feed pipe 25 for feeding the refrigerant to the hollow part and a refrigerant-discharging pipe 29 discharging the refrigerant from the hollow part are connected to the electrode 13. The electrode 13 is a rod extending in the width direction of a material 1 to be treated and whole peripheral face of a non-opposite part with the material in the longitudinal direction is covered with a shield material 31 made of metal and formed separately by a prescribed space from the electrode surface and grounded. The electrode 13 is fitted into a single socket 35 and the socket 35 is detachable to the vacuum housing 3.
Inventors:
Hiroyuki Tamaki
Sumitaka Tatsuta
Sumitaka Tatsuta
Application Number:
JP14786493A
Publication Date:
September 04, 2001
Filing Date:
June 18, 1993
Export Citation:
Assignee:
Fuji Photo Film Co., Ltd.
International Classes:
B01J3/00; B29C59/14; B29C71/04; C08J7/00; C23C14/24; H01T19/00; (IPC1-7): B29C71/04
Other References:
【文献】米国特許3959104(US,A)
Attorney, Agent or Firm:
Tadashi Hagino (3 outside)