Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
POWDER AGITATOR
Document Type and Number:
Japanese Patent JPH0734246
Kind Code:
A
Abstract:

PURPOSE: To provide the powder agitator constituted to improve the property to agitate powder and to hardly electrify the powder with a plus charge as the powder agitator to be used for an ion implantation device and ion beam vapor deposition device.

CONSTITUTION: This powder agitator 11 is composed of a base plate 12, a container 13 housing the powder, plural supports 15 for supporting the container 13 on the base plate 12 and a pair of piezoelectric elements 14, 14 as a vibration generating section disposed on these supports 15. The container 13 is oscillated in a rotating direction by impressing a voltage to these piezoelectric elements 14, 14 and the speed of oscillation is varied according to the oscillation direction, by which the powder in the container 13 is agitated.


Inventors:
TOKI HITOSHI
YONEZAWA SADAHISA
ITO SHIGEO
Application Number:
JP1992000191682
Publication Date:
February 03, 1995
Filing Date:
June 25, 1992
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FUTABA DENSHI KOGYO KK
International Classes:
C23C14/00; B01F11/00; C23C14/50; (IPC1-7): C23C14/50; C23C14/00