Title:
パウダープロテクティング３ウェイバルブ
Document Type and Number:
Japanese Patent JP6921453
Kind Code:
B2
Abstract:
Disclosed is a powder protecting three-way valve for a semiconductor or flat panel display manufacturing apparatus, including: a valve casing including an inlet and a plurality of outlets; a rotating ball rotatably installed in the valve casing to control a flow direction of reaction by-product gas; a nitrogen gas supply member which receives nitrogen gas from an outside, guides a flow of the nitrogen gas using a guide path, and supplies the nitrogen gas into the valve casing to prevent a powder contained in the reaction by-product gas from accumulating in the valve casing; and a heating unit installed in the nitrogen gas supply member to heat the nitrogen gas passing through an interior of the nitrogen gas supply member. The nitrogen gas supply member is formed as a thin flat body pressed against one side surface of the valve casing and is integrally coupled to the valve casing.
Inventors:
Lee, Jong Chul
Application Number:
JP2020545021A
Publication Date:
August 18, 2021
Filing Date:
September 19, 2018
Export Citation:
Assignee:
Boya Company, Limited
International Classes:
F16K11/087; F16K5/06; F16K49/00
Domestic Patent References:
| JP2006303414A | ||||
| JP2009514207A | ||||
| JP2006283935A | ||||
| JP6185671A | ||||
| JP432873B1 | ||||
| JP2007155328A | ||||
| JP53134140U |
Attorney, Agent or Firm:
Harakenzo world patent & trademark