Title:
粉末供給装置、溶射装置、粉末供給方法及び溶射方法
Document Type and Number:
Japanese Patent JP7144281
Kind Code:
B2
Abstract:
A powder feeder according to one aspect of the present disclosure is a powder feeding device that feeds powder from a feeder to a nozzle. The powder feeding device includes a cartridge configured to store the powder in an airtight condition, and includes the feeder. The cartridge includes a port from which the powder is stored and withdrawn, and an open/close valve for opening and closing the port. The feeder includes a connection portion to which the cartridge is removably connected, a supply port configured to supply the powder in the cartridge connected to the connection portion into the feeder, and an opening/closing valve for opening and closing the supply port. The feeder is configured to insert the powder supplied from the supply port to the feeder into the nozzle, and the cartridge and the feeder are configured to form an enclosed space between the port and the supply port in response to the cartridge being connected to the connection portion.
Inventors:
Yoshiyuki Kobayashi
Hiroshi Itoh
Hiroshi Itoh
Application Number:
JP2018203266A
Publication Date:
September 29, 2022
Filing Date:
October 29, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C4/134; B05B7/14; B05B7/22; B65G53/66; B65G65/40
Domestic Patent References:
| JP42000362B1 | ||||
| JP8044174A |
Foreign References:
| WO2017064867A1 | ||||
| WO2018105700A1 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito