To provide a power generation device that improves the amount of power generation.
The power generation device includes a cantilever-forming substrate 20 which is formed using an element formation substrate 120 and has a frame (support) 21 and a cantilever 22, and a piezoelectric conversion unit (a power generation unit) 24 which generates an AC voltage according to vibration of the cantilever 22, wherein the lower electrode 24a and the upper electrode 24c of the piezoelectric conversion unit 24 are electrically connected with a pad 27a for the lower electrode and a pad 27c for the upper electrode. The frame 21 side end of a piezoelectric conversion region where a piezoelectric layer 24b touches the lower electrode 24a and the upper electrode 24c, respectively, in the piezoelectric conversion unit 24 is aligned with the boundary of the frame 21 and the cantilever 22.
MATSUSHIMA CHOMEI
AIZAWA KOICHI
Next Patent: POWER GENERATION DEVICE