To provide a power generation device that implements improved stability of power generation characteristics and improved power generation efficiency.
The power generation device includes a MEMS (microelectromechanical systems) structure 1. The MEMS structure 1 has: a frame part 11; a vibration part 12 arranged inside the frame part 11; a pair of torsion spring parts 13 supported on the frame part 11 with the vibration part 12 in between; and a planar coil 14 formed on the vibration part 12. The power generation device further includes: two permanent magnets 2a, 2b oppositely arranged in a pair with the vibration part 12 and the planar coil 14 in between; and a support substrate 3 for supporting the MEMS structure 1 and the permanent magnets 2a, 2b in a predetermined relative positional relationship. In the power generation device, the pair of permanent magnets 2a, 2b are arranged with an aligned pole direction.
GOTO KOJI
Mizuhiji Katsuhisa
Takeshi Sakaguchi
Hidetoshi Kitade
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