Title:
電力用半導体装置
Document Type and Number:
Japanese Patent JP5787853
Kind Code:
B2
Inventors:
Tomoko Suedai
Tsuneo Ogura
Yuichi Oshino
Hideaki Ninomiya
Kazutoshi Nakamura
Tsuneo Ogura
Yuichi Oshino
Hideaki Ninomiya
Kazutoshi Nakamura
Application Number:
JP2012200858A
Publication Date:
September 30, 2015
Filing Date:
September 12, 2012
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L27/04; H01L21/76; H01L29/739; H01L29/78; H01L29/861; H01L29/868
Domestic Patent References:
| JP2009141202A | ||||
| JP2008047565A | ||||
| JP2007258363A | ||||
| JP2008205252A |
Attorney, Agent or Firm:
Masahiko Hinataji