To allow a power source connection device to stand alone, manufacture the same at low cost with ease, and lessen loss of a pulse voltage waveform by constituting power source connection member and a control cable of copper pipes.
The filament power source, the grid pulse power source, and the ion pump power source of a power source device 2 and the cathode, the grid, and the ion pump of a high voltage electron gun 1 are respectively connected by power source connection material 9, a control cable 12, and an ion pump drive cable 14. The connection material 9 comprises a large diameter copper pipe 9a, and the cables 12, 14, small diameter copper pipes 12a, 14a. It is desirable that the connection material 9 and the cables 12, 14 are supported mutually with predetermined spacings by support plates 22 made of nonconductive material such as an acrylic plate and the like, Thereby, the increase of floating electrostatic capacity resulting from coating insulation in the case of a conventional high voltage cable is prevented so that influence on a pulse voltage output to the grid is reduced. Thanks to weight reduction and strength increase no installation of a support pole is required.
| JPH09199071 | HIGH VOLTAGE TERMINAL FOR ION INJECTION APPARATUS |
| JP3088550 | FIELD EMISSION TYPE ELECTRON GUN |
| JPH09245723 | ION INPLANTING DEVICE |
MAJIMA TAKASHI
KANEKO NAMIO
YAMAMOTO MASASHI
YAMAMOTO AKIYOSHI
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