PURPOSE: To improve the positioning accuracy of a precision feed mechanism using a piezoelectric element, and increase the stroke thereof by providing a feed piezoelectric element and a clamp piezoelectric element in parallel to a guide rail and in such a way as clamping the guide rail from both sides of a table.
CONSTITUTION: The first and second feed piezoelectric elements 4 and 5 are projected from one side 3a of a table 3 at both sides of a guide rail 2 and in parallel thereto. Also, the first and second clamp piezoelectric elements 6 and 7 are extended from the neighborhood of the free ends of the elements 4 and 5 toward the guide rail 2. Similarly, the other end 3b of the table 3 is provided with the third and fourth feed piezoelectric elements 8 and 9, and the third and fourth clamp piezoelectric elements 10 and 11. A control section 12 supplies or interrupts power, and performs voltage control via the suitable combination of the elements 4 to 11. For example, the third and fourth clamp piezoelectric elements 10 and 11 are used to hold the guide rail 2, while the third and fourth feed piezoelectric elements 8 and 9 are used for inching the guide rail 12.
| JP4996285 | Clamp sleeve |
| JPS60109833 | [Title of the device] X-Z table |
MIZUKANE MASAHIRO
MORIWAKI TOSHIMICHI
SHAMOTO EIJI
