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Patent Searching and Data


Title:
PRECISION FILTRATION FILTER CARTRIDGE
Document Type and Number:
Japanese Patent JP2002066275
Kind Code:
A
Abstract:

To provide a filter cartridge which has resistance to chemical liquids frequently used in a semiconductor manufacturing process and has a function for decreasing metal ions in the chemical liquids.

A precision filtration filter cartridge characterized by a constitution wherein, in the precision filtration filter cartridge prepared from a constitution wherein the whole of microporous filter membranes, membrane supports, a core, an outer peripheral cover and end plates constituting the filter cartridge is made of a polysulfone based polymer, the supports have a metal ion catching function, is provided. The precision filtration filter cartridge (1) characterized by the membrane supports being microporous membranes in which a number of fine channels and/or projected parts are formed is provided. The precision filtration filter cartridge (1) or (2) characterized by the microporous filtration membranes comprising a sulfonated polysulfone based polymer is provided.


Inventors:
OTANI SUMIO
Application Number:
JP2000265650A
Publication Date:
March 05, 2002
Filing Date:
September 01, 2000
Export Citation:
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Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
B01D69/10; B01D61/18; B01D71/68; B01D71/82; (IPC1-7): B01D69/10; B01D61/18; B01D71/68; B01D71/82
Attorney, Agent or Firm:
Shohei Oguri (4 outside)