Title:
PRECISION POSITIONING DEVICE
Document Type and Number:
Japanese Patent JP3217522
Kind Code:
B2
Abstract:
PURPOSE: To improve the positioning accuracy and shorten the positioning time of the device by providing a control means which compensates a disturbance force against a traveling body.
CONSTITUTION: A first control means 7 switches a speed control mode compensator 14 and position control mode compensator 15 to each other through change- over switches 12 and 13 in accordance with the deviation ep between the displacement X1 of a carried object 3 against a stool 4 detected by means of a position detecting means 5 fixed to the stool 4 and a target position Rp. A control command (u) which is the sum of the commands from the means 7 and a second control means 8 is supplied to a linear motor 2 fixed to the stool 4. The means 8 obtains speed information V1 by differentiating the position information of the carried object measured by means of a position measuring means 5 with a differentiator 9 and finds the estimated value Fde of a disturbance force generated by the vibrations, pitching, and rolling of the stool 4. Then the means 8 adds a controlled variable u" required for compensating the value Fde to output u' of the means 7.
Inventors:
Mikio Sato
Shinji Wakui
Katsumi Asada
Shinji Wakui
Katsumi Asada
Application Number:
JP2598093A
Publication Date:
October 09, 2001
Filing Date:
January 22, 1993
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F9/00; G03F7/20; G05B5/01; G05B19/19; G05D3/12; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G05D3/12
Domestic Patent References:
| JP3110605A | ||||
| JP3151625A | ||||
| JP3155113A | ||||
| JP3110606A | ||||
| JP3105510A |
Attorney, Agent or Firm:
Tetsuya Ito