Title:
精密温調システム、その制御装置
Document Type and Number:
Japanese Patent JP5428525
Kind Code:
B2
Abstract:
This invention relates to a precision temperature adjustment system and its control device. The subject of this invention is to provide a precision temperature adjustment system capable of inhibiting the variation of air temperature of a temperature adjustment subject space to a minimal extent even when unstable interference occurs. The precision temperature adjustment system is provided with an interference observation part (10) equipped with an interference presumption part (11) and a nominal model (14); the nominal model (14) is a model simulates a controlled subject (5), and the modeling of the controlled subject (5) is carried out considering the heat and flux of the air in a channel and the temperature adjustment subject space (chamber, etc.). The presumption part (11) uses a transmission function consistent with the model of the nominal model (14) and produces/outputs an interference presumption value (dm) according to deviation (yN-y) between the output (yN) of the nominal model (14) and the output (y) of the controlled subject (5). The interference presumption value (dm) is multiplied by the preset gain KADD (≤1, such as around 0.7), and the value obtained is added to the operation amount MV(s).
Inventors:
Hideyuki Iwata
Koji Matsumoto
Hiroe Fujiwara
Koji Matsumoto
Hiroe Fujiwara
Application Number:
JP2009124503A
Publication Date:
February 26, 2014
Filing Date:
May 22, 2009
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
F24F11/02; F24F7/06; G05B13/02; G05B13/04; G05D23/19
Domestic Patent References:
| JP2002202802A | ||||
| JP7228126A | ||||
| JP2002287804A |
Attorney, Agent or Firm:
Yoshiyuki Osuga