PURPOSE: To fabricate a cam shaft excellent in durability in good yield, in fabricating the cam shaft, by molding a substrate material into a predetermined profile while vapor depositing a hard metal compound to the cam part of the molded one by a chemical vapor deposition method.

CONSTITUTION: A cam shaft substrate material to which a fundamental shape is imparted by casting and the other mechanical processing is preformed precisely so as to obtain a predetermined cam profile. In the next step, the molded one is put in a reaction furnace for chemical vapor deposition and heated to 1,000W 1,200°C. On the other hand, TiCl4 is gasified by heating the same to 20W80°C and sent into the reaction furnace along with CH4 and H2 being carrier gases. TiCl4 and the carrier gases are chemically reacted on the surface of the cam shaft substrate material in the furnace to form TiC and HCl while TiC among them is precipitated to the surface of the cam shaft substrate material to form a hard TiC vapor deposition layer. Because the largest load is especially applied to a cam nose part Cn, the life of a cam is prolonged by the enhancement of the abrasion resistance of said part.