Title:
PREPARATION FOR EVAPORATION MATERIAL CONTAINING ARSENIC
Document Type and Number:
Japanese Patent JPS53127381
Kind Code:
A
Abstract:
PURPOSE: To prepare evaporation material which shows less white flaws, by removal of unreacted As from amorphous material contg. As, e.g., AsS3, or AsSe3 so as to prevent the formation of As lumps when As-contg. layer is formed on a photoconductive target for vision etc.
Inventors:
YOSHIDA OKIO
Application Number:
JP4153577A
Publication Date:
November 07, 1978
Filing Date:
April 13, 1977
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
C23C14/02; C23C14/24; (IPC1-7): C23C13/04; C23C15/00
Domestic Patent References:
| JPS513632A | 1976-01-13 | |||
| JP43012247A |
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