PREPARATION OF SILAZANE PRECURSOR

Title:

PREPARATION OF SILAZANE PRECURSOR

Document Type and Number:

Japanese Patent JP2637040

Kind Code:

B2

Abstract:

PURPOSE: To obtain a silazane precursor advantageously on an industrial scale which is useful in the starting materials for the preparation of a ceramic such as silicon nitride and silicon carbide by reacting a dihalogenosilane with a monoalkylamine compound in a solution at a specific temperature.
CONSTITUTION: In a flame-dried flask equipped with an overhead mechanical stirrer and a nitrogen inlet is placed anhydrous ether and then, a dihalogenosilane (e.g. dichlorosilane or the like) is added and dissolved therein and at a temperature of lower than about 40°C or at a temperature of lower than about 0°C, a monoalkylamine compound represented by the formula: RNH2 (wherein R is ethyl, propyl, butyl, aryl or lower alkyl substituted aryl in the case of the temperature of lower than 40°C or R is methyl in the case of the temperature of lower than 0°C) is added to this solution and reacted to obtain a desired silazane precursor advantageously on an industrial scale which is useful in the preparation of a ceramic such as silicon nitride and silicon carbide, etc.

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Inventors:

IIGARU DEII BURAMU
RICHAADO EMU REIN
KENIISU BII SHUWARUTSU
ROBAATO EMU PURATSUTSU
DEBITSUDO JEI ROOKURITSUFUE
AREN ERU DOTSUJI
JONASAN EMU MATSUKUREODO
DARIRU ERU ROBAATSU

Application Number:

JP26394293A

Publication Date:

August 06, 1997

Filing Date:

October 21, 1993

Export Citation:

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Assignee:

ESU AARU AI INTERN

International Classes:

B01J31/22; B32B9/00; B32B15/00; C01B21/068; C04B35/08; C04B35/16; C04B35/185; C04B35/52; C04B35/56; C04B35/571; C04B35/58; C04B35/589; C04B35/63; C04B41/45; C07B61/00; C07F7/08; C07F7/10; C07F7/21; C08G77/04; C08G77/06; C08G77/26; C08G77/38; C08G77/388; C08G77/398; C08G77/48; C08G77/54; C08G77/62; C08G79/00; D01F9/10; (IPC1-7): C07F7/10; C08G77/62

Domestic Patent References:

JP61287930A

Other References:

【文献】米国特許3318823(US,A)

Attorney, Agent or Firm:

Shusaku Yamamoto

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