PURPOSE: To prepare a thermal head with high stability and confidence with a high yield, in preparing a thin thermal head, by a method wherein a negative pattern is formed on a substrate plate by a lift-off material and, thereafter, a lift-off method forming a positive pattern is used.

CONSTITUTION: On a ceramic substrate plate 1 having a plaze layer 2, a negative pattern 3 is formed by a lift-off material. As the lift-off material, a metal having etching property against tantalum nitride or the like is pref. used. On the substrate plate having the negative pattern 3 provided thereon, a heat generator layer 4, a barrier layer 5 and an electrode inductor layer 6 are laminated succedingly and, thereafter, the lift-off material is etched to form a positive pattern used as a heat generator part or an electrode part. The resultant positive pattern is coated by a resist 7 and, thereafter, by etching the electrode conductor layer 6 and the barrier layer 5, an arranged wire pattern of the thermal head comprising the heat generator part 8 and the electrode part 9 is formed.