Title:
PRESSURE OR ACCELERATION SENSOR
Document Type and Number:
Japanese Patent JPH04326033
Kind Code:
A
Abstract:
PURPOSE: To obtain a sensor for measuring pressure and acceleration.
CONSTITUTION: The sensor for measuring pressure or acceleration comprises a structured silicon carrier 10, and a frame 11 having a displaceable membrane 12 formed on the first major surface thereof. The membrane 12 has a reinforcing region and a first part structure is coupled with the membrane 12 in the reinforcing region. At least a part of the membrane 12 extends over the frame 11 and forms the electrode of a capacitor. At least one counter electrode 161, 162 of the capacitor is arranged oppositely to the first part structure in the region of the frame 11.
Inventors:
FURANKU BANTEIIN
Application Number:
JP4298192A
Publication Date:
November 16, 1992
Filing Date:
February 28, 1992
Export Citation:
Assignee:
BOSCH GMBH ROBERT
International Classes:
B81B3/00; G01L9/00; G01L9/04; G01L9/12; G01P15/08; G01P15/125; H01L29/84; (IPC1-7): G01L9/04; G01P15/125
Attorney, Agent or Firm:
Toshio Yano (2 outside)