Title:
真空装置及び真空装置の真空容器内の圧力制御方法
Document Type and Number:
Japanese Patent JP5862943
Kind Code:
B2
Inventors:
Masahiko Nagasaka
Shogo Nakajima
Takayuki Nozawa
Osamu Sugino
Mishima Career
Shogo Nakajima
Takayuki Nozawa
Osamu Sugino
Mishima Career
Application Number:
JP2011250334A
Publication Date:
February 16, 2016
Filing Date:
November 16, 2011
Export Citation:
Assignee:
Shinto Industry Co., Ltd.
International Classes:
F04B37/16
Domestic Patent References:
| JP9158833A | ||||
| JP11153087A | ||||
| JP62169416A |
Attorney, Agent or Firm:
Takuma Makino