PURPOSE: To always realize the pressure control with high accuracy in all of a pressure raising process, a pressure holding process and a pressure lowering process.
CONSTITUTION: The control is executed in order of a pressure raising process for raising pressure for pressurizing a solid body, a pressure holding process for holding the raised pressure, and a pressure lowering process for lowering the held pressure. In the pressure raising process, a liquid medium is supplied in a large supply quantity by a liquid medium supply means 17, and also, pressure control is executed in a state that an opening of a flow rate control valve 22 is made small, and in the pressure holding process, the liquid medium is supplied in a small supply quantity by the Liquid medium supply means 17, add also, pressure control is executed in a state that the opening of the flow rate control valve 22 is made small, and in the pressure lowering process, the liquid medium is supplied in a small supply quantity by the liquid medium supply means 17, and also, pressure control is executed in a state that the opening of the flow rate control valve 22 is made large.
UEDA SHOICHI
OKAMOTO HIROSHI
MURAKAMI MASAKAZU
